| 摘要 |
PROBLEM TO BE SOLVED: To increase the reactivity of gas by stable discharging of electricity between adjacent electrodes in a plasma reactor provided with many bar electrodes arranged orthogonally to the gas flow direction. SOLUTION: Each of the electrodes has a regular hexagonal section enclosed with six planes. Since the opposed planes of the adjacent electrodes are arranged in parallel with each other, the plasma volume as the volume of a gap formed between the electrodes is sufficiently secured, and the agitation and mixing of the gas are promoted by the many electrodes to increase the reactivity. Meanwhile, as the dimensions of the gaps between the adjacent electrodes are made uniform, electric discharge is stabilized, and further the interfacial area of the electrode enhanced in density of the active grains in the plasam is increased to raise the reactivity. The section of the electrode can be a square, a regular triangle or a rhombus as well as a regular hexagon. |
