| 摘要 |
A light that radiates in the wavelength region of a narrowband laser beam is generated, this light is converted to a collimated beam after passing through a slit, and the converted light is incident on a narrowband module. The outputted light from the narrowband module is condensed, and this condensed light is incident on a light detector. A total reflection mirror is provided in a removable manner on the optical path in front of the narrowband module, the ratio between the output of the light detector in a state in which the total reflection mirror is provided on the optical path, and the output of the light detector in a state in which the total reflection mirror is removed, is determined, and the narrowband efficiency of the above-mentioned narrowband module is inspected based on the determined ratio.
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