Easy on/off cover for a pad conditioning assembly

摘要

A cover for a pad conditioning assembly for use in a chemical mechanical polishing apparatus and a pad conditioning assembly incorporating such cover are disclosed. The cover may be formed of a body portion with at least two boss sections and at least two locking tabs mounted in the boss sections. The cover provides a quick mount/dismount to a support plate of a pad conditioning assembly by engaging and disengaging the blocking tabs. The cover further provides the advantage that when a substantially transparent material is used in fabricating the cover, any malfunction or breakage of the components under the cover can be readily observed. The cover is further provided with an extended skirt section such that all the major components of the pad conditioning assembly can be shielded a slurry solution and cleaning fluids.