| 摘要 |
PROBLEM TO BE SOLVED: To provide an alternative material of quartz glass which can prevent occurrence of a micro crack, chipping or generation of particles after machining. SOLUTION: A composite material which is principally composed of a quartz glass phase and a composite phase of the quartz glass phase with Si one kinds of compounds from among a group of silicon carbide, silicon nitride, silicon, titanium nitride, and titanium carbide is provided. Preferably, the weight ratio of the quartz glass phase is 10-95 wt.%.
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