发明名称 Optical method for the determination of grain orientation in films
摘要 A method for the determination of grain orientation in a film sample is provided comprising the steps of measuring a first transient optical response of the film and determining the contribution to the transient optical response arising from a change in the energy distribution of the electrons in the sample, determining the contribution to the transient optical response arising from a propagating strain pulse within the sample, and determining the contribution to the transient optical response arising from a change in sample temperature of the sample. The grain orientation of the sample may be determined using the contributions to the transient optical response arising from the change in the energy distribution of the electrons, the propagating strain pulse, and the change in sample temperature. Additionally, a method for determination of the thickness of a film sample is provided. The grain orientation of the sample is first determined. The grain orientation, together with the velocity of sound and a propagation time of a strain pulse through the sample are then used to determine the thickness of the film sample.
申请公布号 US6317216(B1) 申请公布日期 2001.11.13
申请号 US19990459701 申请日期 1999.12.13
申请人 BROWN UNIVERSITY RESEARCH FOUNDATION 发明人 MARIS HUMPHREY J.
分类号 G01N21/84;H01L21/66;(IPC1-7):G01B9/02 主分类号 G01N21/84
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