| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a unit for gas separation/recovery/charging in which, when gaseous SF6 and a gaseous diluent other than SF6 in a gas holding vessel 26 are recovered, even if unseparated gaseous SF6 remains in the separated gaseous diluent in a certain concentration or higher in a stage for separating the gaseous SF6 and the gaseous diluent from each other in a gas separation section 21, the unseparated gaseous SF6 can be prevented from diffusion into the atmosphered. SOLUTION: In the stage for separating gaseous SF6 and the gaseous diluent from each other in the gas separation section 21, a discharged gas consisting of the separated gaseous diluent in which a minute amount of gaseous SF6 coexists as a contaminant is recycled to the gas holding vessel 26 through a discharged gas outlet 2 of the gas separation section 21 and a discharged gas inlet 2' of the gas holding vessel 26.</p> |
