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发明名称
摘要
申请公布号
JP2001521993(A)
申请公布日期
2001.11.13
申请号
JP20000519129
申请日期
1998.11.03
申请人
发明人
分类号
C23C4/10;C23C30/00;F01D5/28;(IPC1-7):C23C30/00
主分类号
C23C4/10
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