Screw vacuum pump having valve controlled cooling chambers

摘要

A discharge side housing 3 has a third cooling water chamber 19 communicating with a first cooling water chamber 7 of a main housing 1 through a cooling water passage 26. The third cooling water chamber 19 is connected to a cooling water outlet pipe 27 which is connected to an inlet port 28a of a three-way valve 28. The three-way valve 28 has a switching port 28b which can communicate with a pipe line 29 connected to the first cooling water chamber 7. The three-way valve 28 has an outlet 28c connected to a pipe line 30 which communicates with a second cooling water chamber 22 of a suction side housing 2. The second cooling water chamber 22 is connected to a cooling water discharge line 31 provided with a flow control valve 32 allowing a back pressure for a cooling water flowing thereinto.