| 摘要 |
PROBLEM TO BE SOLVED: To provide a coating/drying device for keeping the quality of the surface of a coating film excellent after drying while increasing the recovery efficiency of an applied solvent in case of manufacturing a photosensitive material or a display material using the solvent, the coating/drying method and a coated material having the quality of the surface of the coating film kept excellent. SOLUTION: A coating/drying device having at least a coating process and drying processes, has at least 2 drying processes existing under an inert gas atmosphere and each having a structure to recover the evaporated solvent, after the coating process. The drying process nearest to the coating process among the drying processes has a drying rate slower than that in the next drying process.
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