| 摘要 |
PURPOSE:To increase a recording density by forming the track widths of the stamper to a smaller width and smaller pit. CONSTITUTION:The surface of a master disk 13 consisting of glass, etc., is subjected to a vapor treatment with hexamethyl disilazane (HMDS) and thereafter, a positive type resist is applied thereon. The film of nickel is then formed by sputtering. The nickel is further electroformed to form a metallic layer. This surface is further subjected to the vapor treatment of the HMDS. The film of a 2nd resist of a positive type is then formed by spin coating. The 2nd resist layer is exposed by an optical system to form exposed parts 16 and unexposed parts 17. The 2nd resist layer is thereafter developed and the nickel is sputtered to form the film, by which the developed nickel film 18 and undeveloped nickel film 19 are formed. The resist layer 19 and the metallic layer are thereafter removed from the master disk by a solvent, by which the stamper 20 for disks is obtd. |
