发明名称 OPTICAL DETECTOR WITH A FILTER LAYER MADE OF POROUS SILICON AND METHOD FOR THE PRODUCTION THEREOF
摘要 <p>An optical silicon-based detector with a porous filter layer that has a laterally modifiable filter effect, comprising a plurality of integrated photosensitive cells. The invention also relates to a method for the production of an optical detector by creating an insulating layer on the porous filter layer and by providing active filter surfaces.</p>
申请公布号 EP1151479(A2) 申请公布日期 2001.11.07
申请号 EP19990967910 申请日期 1999.12.24
申请人 FORSCHUNGSZENTRUM JUELICH GMBH 发明人 MARSO, MICHEL;ARENS-FISCHER, RUEDIGER;HUNKEL, DIRK
分类号 G01J3/51;G01J1/02;G01J1/04;G01J3/12;G01J3/26;G02B5/18;H01L;H01L21/00;H01L31/0216;H01L31/028;H01L31/10;(IPC1-7):H01L31/021 主分类号 G01J3/51
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