发明名称 |
OPTICAL DETECTOR WITH A FILTER LAYER MADE OF POROUS SILICON AND METHOD FOR THE PRODUCTION THEREOF |
摘要 |
<p>An optical silicon-based detector with a porous filter layer that has a laterally modifiable filter effect, comprising a plurality of integrated photosensitive cells. The invention also relates to a method for the production of an optical detector by creating an insulating layer on the porous filter layer and by providing active filter surfaces.</p> |
申请公布号 |
EP1151479(A2) |
申请公布日期 |
2001.11.07 |
申请号 |
EP19990967910 |
申请日期 |
1999.12.24 |
申请人 |
FORSCHUNGSZENTRUM JUELICH GMBH |
发明人 |
MARSO, MICHEL;ARENS-FISCHER, RUEDIGER;HUNKEL, DIRK |
分类号 |
G01J3/51;G01J1/02;G01J1/04;G01J3/12;G01J3/26;G02B5/18;H01L;H01L21/00;H01L31/0216;H01L31/028;H01L31/10;(IPC1-7):H01L31/021 |
主分类号 |
G01J3/51 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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