ANGULAR SPEED SENSOR

摘要

It is an object of the invention to increase the drive efficiency of an angular speed sensor, which uses s tuning fork of a single-crystal piezoelectric material such as quartz. An angular speed sensor comprises driving electrodes (1, 2) and detection electrodes (3, 4) provided, respectively, on first and second main surfaces, the outside surface and the inside surface of one prong (10a) of a tuning fork (10); and a driving electrode (5), a monitor electrode (6), and detection electrodes (7, 8) provided, respectively, on first and second main surfaces, the inside surface and the outside surface of the other prong (10b). A power supply (9) applies drive voltage so that the driving electrodes (2,5) may have the same polarity and that the driving electrode (1) may have the opposite polarity to the driving electrodes (2,5). <IMAGE>