| 摘要 |
PURPOSE: A slider head of an optical pickup device and a method for manufacturing the same are provided to improve a response speed, a tracking speed, and a tracking accuracy by forming a hollow region and an air-bearing surface on a substrate. CONSTITUTION: Etching masks(43) are formed on an upper face of a lower face of a silicon substrate(41), respectively. A part of the etching mask formed on the upper face of the substrate(41) is patterned by a photo-lithography process and an etching process. A recess(44) is formed on the silicon substrate(41) by using an anisotropic etching method. The second pattern process for the etching mask is performed. An air-bearing surface is formed on the silicon substrate(41) by performing the etching process using the patterned mask. A hollow region(47) is formed by patterning the etching mask(43) formed on the lower face of the silicon substrate(41). A slider backside structure of the hollow region(47) and a silicon support is formed by etching selectively the silicon substrate(41).
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