发明名称 Apparatus, system, and method for precision positioning and alignment of a lens in an optical system
摘要 An apparatus, system, and method for precision positioning and alignment of a lens in an optical system. The apparatus includes a support, a lever having a pivot point, and a first actuator and a second actuator coupled to the lever and to the support. The first actuator and the second actuator are used to position the lever and thereby position the lens. The first actuator is used to make finer position adjustments of the lever than are made by the second actuator. In one embodiment, the first actuator and the second actuator are pneumatic bellows. In another embodiment, the first actuator and the second actuator are electromechanical devices. A spring can be used to apply a biasing force to the lever.
申请公布号 AU5378301(A) 申请公布日期 2001.11.07
申请号 AU20010053783 申请日期 2001.04.25
申请人 SILICON VALLEY GROUP INC 发明人 MICHAEL F. MEEHAN;DAVID G. TAUB;DANIEL N. GALBURT
分类号 G02B7/02;G03F7/20;H01L21/027 主分类号 G02B7/02
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