首页
产品
黄页
商标
征信
会员服务
注册
登录
全部
|
企业名
|
法人/股东/高管
|
品牌/产品
|
地址
|
经营范围
发明名称
PLASMA DEPOSITION METHOD AND APPARATUS WITH MAGNETIC BUCKET AND CONCENTRIC PLASMA AND MATERIAL SOURCE
摘要
申请公布号
EP1151147(A1)
申请公布日期
2001.11.07
申请号
EP20000913352
申请日期
2000.02.02
申请人
TOKYO ELECTRON LIMITED
发明人
VUKOVIC, MIRKO
分类号
H01J37/34;C23C14/34;C23C14/35;H01J37/32;H01L21/203;(IPC1-7):C23C14/35
主分类号
H01J37/34
代理机构
代理人
主权项
地址
您可能感兴趣的专利
Conveyor system for use in fuel injection system of internal combustion engine for conveying medium, particularly fuel, has check valve inserted in flow connection and comprises reverse switching position and passage switching position
Locking device i.e. lock, for body-side locking of e.g. bonnet of motor car, has device for allowing movement of locking pawl into closing position during association of shifting movement of rotary latch with captivation of clamp at latch
Motor vehicle has headlights that provides headlight flasher signal with operation of control element over headlight low beam when ignition unit is switched off
Manufacturing cylindrical tube of internal combustion engine, comprises mechanically processing piston bearing surface of cylindrical tube, during which additive is mechanically introduced into piston bearing surface
Viewing hood for steam outlet, has suction chamber for sucking fumes and vapors, where suction chamber is formed at cooking position, which is arranged below viewing hood, and cover is moved in operating position in rear direction
Method for producing ornament from paving-stone to use as inlay work for e.g. stairway step, involves projecting ornament on substrate, forming support plate from concrete, steel-reinforcing support plate and providing plate as substrate
Heat storage device for parabolic trough power plant, has storage tank including inner volume through which heat transfer medium flows, and pipe filled with medium, arranged in tank and including inner wall with anti-corrosion coating
Method for manufacturing complementary metal-oxide-semiconductor circuit, involves applying layer web made of layer material with certain width predetermined by layout of polymer electronics on carrier by nozzle
Register nozzle needle for e.g. common-rail fuel injector for diesel engine of motor car, has nozzle needle and nozzle needle case sequentially releasing respective cross-section openings of injector upon control of nozzle needle and case
Method for controlling clutch for electromotor in motor vehicle, involves adjusting rotation speed of electromotors to predefined speed, if actual speed of electromotors does not correspond to simulated actual speed
Gelcoat composition, comprises one unsaturated polyester resin, one non-volatile reactive monomer, pigments and fillers, an accelerator, an amine accelerator, an ester and additives
Drive unit i.e. electromotive drive unit, for e.g. drive shaft, of motor car, has drive element rotated around rotational axis of rotor shaft, and planetary drive forming kinematic connection between electromotor and clutch
Air spring arrangement for automotive- and machine construction, has air spring bellow formed of polymeric material with elastic properties, where air spring bellow includes volume elastic air chamber
Umbrella holding arrangement has umbrella and holder, which is formed from base plate element, where umbrella is fixed at base plate element
Illumination device for use in front region of motor car, has two spatially separated regions individually rotating functional units in viewing area by displacement of multi functional console
Method for oil film interferometric measurement of wall shear stress on surface, involves extracting oil adjacent to surface such that oil flows through surface, where oil is applied on rotor near rotation axis
Method for operating industrial truck in operating region, involves computing tire wear from increase of revolution number of wheel for measuring section according to reduction of wheel diameter
Method for operating driver assistance system of motor vehicle, particularly for providing situation based warnings to driver, involves determining parameter that characterizes imminent of curve passage of motor vehicle
Method for determining three-dimensional coordinates of object, involves projecting pattern on object and receiving light reflected from object, where pattern is projected on object by light sources
Clamping apparatus for luggage rack of passenger car for fastening supporting foot at roof rails of motor car, has overload protection device transferring rotating movement of rotary unit into screwing movement of screwing arrangement