METHOD FOR MEASURING GRAIN SIZE OF METAL FILM USING PARTICLE MEASURING EQUIPMENT

摘要

PURPOSE: A grain size measurement method of a metal film is provided to quickly analyze grain state of the metal film by measuring a reflectivity of the metal film using a particle measuring equipment. CONSTITUTION: A laser beam is irradiated into a wafer deposited a metal film by a rotation or a line scan methods using a particle measuring equipment. By analyzing only a noise signal among the detected signals, the reflectivity of the metal film is measured two-dimensionally, thereby measuring the grain size of the metal film. At this time, aluminum having a high conductivity is used as the metal film.