METHOD AND APPARATUS FOR CLEANING CHUCK OF TRANSFER ROBOT

摘要

PURPOSE: A method and an apparatus for cleaning a chuck of a transfer robot are provided to remove completely a cleaning solution from a chuck of a transfer robot by using a new cleaning method. CONSTITUTION: A chuck cleaning apparatus(100) includes a vessel(10), a drain line(12), and a dry nozzle(14) in order to clean a chuck(42) of a transfer robot(40) polluted by a chemical solution. A cleaning solution(30) is overflown in the vessel(10). The chuck(42) of the transfer robot(40) is soaked into the vessel(10). The drain line(12) is installed at a bottom portion of the vessel(10). The cleaning solution(30) is drained to the drain line(12). The dry nozzle(14) is installed at an upper end of the vessel(10). A purge gas such as nitrogen gas is injected from the dry nozzle(14) to the chuck(42) of the transfer robot(40) in order to remove moisture from the chuck(42).