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发明名称
FERROELECTRIC DEVICE WITH CAPPING LAYER AND METHOD OF MAKING SAME
摘要
申请公布号
EP1151470(A1)
申请公布日期
2001.11.07
申请号
EP19990973613
申请日期
1999.10.15
申请人
SYMETRIX CORPORATION;MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.
发明人
HAYASHI, SHINICHIRO;OTSUKI, TATSUO;PAZ DE ARAUJO, CARLOS, A.
分类号
H01L21/02;H01L21/316;H01L21/8242;H01L27/108;(IPC1-7):H01L21/316
主分类号
H01L21/02
代理机构
代理人
主权项
地址
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