发明名称 Fabrication of CCD type solid state image pickup device having double-structured charge transfer electrodes
摘要 In a CCD type solid state image pickup device including a semiconductor substrate having photo/electro conversion portions and a first insulating layer formed on the semiconductor substrate, a plurality of charge transfer electrodes are formed on the first insulating layer and are a double structure formed by a first conductive layer and a second conductive layer having a lower resistance value than the first conductive layer. A second insulating layer is interposed between two adjacent ones of the charge transfer electrodes.
申请公布号 US6312970(B1) 申请公布日期 2001.11.06
申请号 US20000635336 申请日期 2000.08.09
申请人 NEC CORPORATION 发明人 OGAWA CHIHIRO
分类号 H01L27/148;H01L29/423;H01L29/768;(IPC1-7):H01L21/00 主分类号 H01L27/148
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