发明名称 Semiconductor device and method for fabricating the same
摘要 The present invention provides a semiconductor device and a method for fabricating the same. In the present invention, an electron depletion preventing layer is formed in a bottom portion of a polysilicon gate of MOSFET devices. In addition, the ion-implanted layer of boron ions is formed in an upper portion of the polysilicon gate to increase conductivity thereof. Because the electron depletion preventing layer is formed in the bottom portion of the polysilicon gate, electron depletion and boron penetration into the transistor channel region can be reduced and thus operational properties of the semiconductor device can be stabilized.
申请公布号 US6313020(B1) 申请公布日期 2001.11.06
申请号 US20000679269 申请日期 2000.10.04
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM HYUN-SIK;SHIN HYUNG-HO
分类号 H01L21/28;H01L21/8238;(IPC1-7):H01L21/320;H01L21/476 主分类号 H01L21/28
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