Method for controlling maintenance of semiconductor fabricating equipment arranged in a processing line

摘要

A method for controlling semiconductor fabricating equipment includes receiving at a maintenance module in a host computer first maintenance data generated from semiconductor fabricating equipment. A value of the first data is compared with a predesignated first reference threshold at the maintenance module. A warning message is displayed on a display device, if the value of the first data is not less than the first reference threshold. If the value of the first data is not less than the first reference threshold, second maintenance data is received, and it is determined whether maintenance of the fabricating equipment occurred. If not, the value of the second data is compared with a predesignated second reference threshold at the maintenance module. If the value of the second data is not less than the second reference threshold, the fabricating equipment is interlocked by the maintenance module, and the fabricating equipment is stopped.