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发明名称
Sputtering chamber coil
摘要
申请公布号
USD450070(S1)
申请公布日期
2001.11.06
申请号
US19980090618F
申请日期
1998.07.13
申请人
APPLIED MATERIALS, INC.
发明人
GOPALRAJA PRABURAM;XU ZHENG;ROSENSTEIN MICHAEL;FORSTER JOHN C.
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主分类号
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