| 摘要 |
In an IC testing apparatus, a sense line which is used for purpose of voltage measurement and a force line which is used for purpose of current supply are connected to a terminal of an IC under test through a first switch and a second switch, respectively, and a functional tester is connected to the terminal of the IC under test through a third switch. The first to the third switch are formed by semiconductor switches, and a fourth switch formed by a semiconductor switch having a reduced on resistance is connected across terminals of the first switch and the second switch which are located opposite from their terminals connected to the terminal of the IC under test. During an overload test in the DC test, the fourth switch is turned on to execute the test.
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