发明名称 GRINDING METHOD OF ROTATING WORK
摘要 PROBLEM TO BE SOLVED: To provide a grinding method capable of keeping uniform residual stress on the upper and lower surfaces of a work when the work is machined thinly, and preventing occurrence of camber of the work. SOLUTION: A rotating direction of the work 24 is changed oppositely at least one time after a half of grinding operation time passes in a grinding, thereby allowing the grinding so that the upper and lower surfaces of the work 24 have a substantially uniform machining distortion layer. The rotating direction of the work 24 is changed oppositely at least one time after a half or more of a predetermined grinding width is ground in the grinding process, thereby allowing the grinding so that the upper and lower surfaces of the work 24 have a substantially uniform machining distortion layer and preventing the occurrence of the camber of swell of the work 24.
申请公布号 JP2001310247(A) 申请公布日期 2001.11.06
申请号 JP20000127033 申请日期 2000.04.27
申请人 NIPPEI TOYAMA CORP 发明人 MURAI SHIRO;OKUYAMA TETSUO;KAWAZU TOMOYUKI
分类号 B24B7/17;H01L21/304;(IPC1-7):B24B7/17 主分类号 B24B7/17
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