VACUUM EXHAUSTER, VACUUM TREATMENT METHOD, AND METHOD FOR FORMING DEPOSITION FILM

摘要

PROBLEM TO BE SOLVED: To form a deposition film excellent in stability, and reduce its cost. SOLUTION: A vacuum exhauster 30 has an oil diffusion pump 1 equipped with an oil container 9 for housing diffusion pump oil therein. The oil diffusion pump 1 and the oil container 9 are communicated with each other through a piping 11 the inside of which can be vacuumed and which has a value 12. The inlet flange 2 of the oil diffusion pump 1 is attached with an exhaust piping 4 equipped with an exhaust value 5, and the outlet flange 3 of the oil diffusion pump 1 is attached with an exhaust piping 6 to be connected to a mechanical booster pump 7 and a rotary pump 8. The oil container 9 is provided with an oil level gauge 10, and the lid 13 of the oil container 9 is provided with a vent piping 14 for communicating the inside of the container 9 with the atmosphere.