发明名称 |
Scanning-aperture electron microscope for magnetic imaging |
摘要 |
A scanning-aperture electron microscope system and method in which a radiation source generates a radiation beam that is incident upon a surface of a sample material causing electrons to be ejected from the surface. When magnetic imaging is being performed, a polarization rotator polarization-modulates the radiation beam. A scanning-aperture probe having an aperture is positioned in proxiity to the surface of the sample material so that photoelectrons ejected from the surface of the sample material pass through the aperture. A detector detects the electrons passing through the aperture. The electron detector outputs a signal in response to the detected electrons that is used for imaging magnetic and/or spectroscopic features of the surface of the sample material. The resolution of the imaged features is about equal to a size of the aperture.
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申请公布号 |
US6313461(B1) |
申请公布日期 |
2001.11.06 |
申请号 |
US19990272289 |
申请日期 |
1999.03.19 |
申请人 |
INTERNATIONAL BUSINESS MACHINES CORP. |
发明人 |
MCCLELLAND GARY MILES;RETTNER CHARLES THOMAS;SAMANT MAHESH GOVIND;WELLER DIETER KLAUS |
分类号 |
G01Q10/04;G01Q30/02;H01J37/285;(IPC1-7):H01J37/252 |
主分类号 |
G01Q10/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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