发明名称 Multiple semiconductor test system for testing a plurality of different semiconductor types
摘要 In a semiconductor device test apparatus, a host computer having a data base writes test resultant data in the data base to output the test resultant data in response to a data request. Each of a plurality of testers performs an electric characteristic test based on a test program to generate a test resultant data for each of semiconductor devices to transmit to the host computer. Each of a plurality of handler sections sets the semiconductor devices of a pallet to a test head for the electric characteristic test. A loader section loads the semiconductor devices from a first tray to the pallet. An unloader section unloads the semiconductor devices from the pallet transported thereto to second trays based on the test resultant data from the host computer. A pallet transporting section transports the pallet to a specific one of the plurality of handler sections before the electric characteristic test, and transports the pallet to the unloader section from the specific one of the plurality of handler sections after the electric characteristic test.
申请公布号 US6314332(B1) 申请公布日期 2001.11.06
申请号 US19980110391 申请日期 1998.07.07
申请人 NEC CORPORATION 发明人 KIDA TOMOYUKI
分类号 G01R31/26;G01R31/01;G01R31/28;H01L21/50;H01L21/66;(IPC1-7):G06F19/00 主分类号 G01R31/26
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