| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide an excellent monitoring system of an article, which is an article conveying and storing system. SOLUTION: In an optional semiconductor integrated circuit manufacturing environment, there are various batches relating to simultaneously progressing wafer manufacturing. Each batch is contained in a different moving container 10 or in a series of containers having cards 40 each cooperates with the moving container 10. The wafers of the different batch are differently operated in a different work station, and finally formed in a different form of semiconductor integrated circuit. The same workstation can be applied to the semiconductor wafer of the different batch, but by conducting different processing in the work station, finally the form of semiconductor wafer can be manufactured.</p> |
