发明名称 ELECTRODIALYZER FOR REGENERATING DEVELOPING WASTE SOLUTION
摘要 PROBLEM TO BE SOLVED: To provide an electrodialyzer for regenerating a developing waste solution capable of reducing the mixing of impurities (especially an oxidative decomposition product formed at an anode) to a concentrated liquid, which is caused by an increase in the amount of impurities in an electrode liquid, to the utmost. SOLUTION: The electrodialyzer is constituted by arranging a desalting liquid chamber, a concentrated liquid chamber and a separate liquid chamber next to both of an anode liquid chamber and a cathode liquid chamber or only next to the anode liquid chamber and passing an aqueous solution containing a tetraalkylammonium hydroxide through the separate liquid chamber and tetraalkylammonium hydroxide is recovered in the concentrated liquid from the developing waste solution. As the aqueous solution containing the tetraalkylammonium hydroxide, a desalting waste liquid obtained from the desalting liquid chamber is preferably used.
申请公布号 JP2001310189(A) 申请公布日期 2001.11.06
申请号 JP20000133416 申请日期 2000.05.02
申请人 JAPAN ORGANO CO LTD 发明人 SUGAWARA HIROSHI
分类号 G03F7/32;B01D61/44;B01D61/46;C02F1/44;C02F1/469;H01L21/027;(IPC1-7):C02F1/469 主分类号 G03F7/32
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