| 摘要 |
PURPOSE: To provide a production method without the contact resistance becoming high and the defective display being generated in a connecting part with a pixel electrode 11 and a gate electrode 1, a source electrode 7, a drain electrode 6 or the like, even when low resistance wiring material is used to an optoelectronic element holding a liquid crystal layer between a TFT array substrate, in which a display pixel having a pixel electrode 11 connected electrically to a thin-film transistor is formed on an insulating substrate and a counter substrate. CONSTITUTION: As a metal thin film acting as the gate electrode 1, etc., or a metal thin film acting as the source electrode 7, the drain electrode 6, etc., the metal thin film which has a layer 1a, consisting of a metal, and a layer 1b in which the nitrogen atom is added to the metal, is used.
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