VAPORIZER FOR GENERATING SUPPLY GAS FOR ARC CHAMBER

摘要

PURPOSE: A vaporizer for generating supply gas for an arc chamber is provided to operate vaporisers at a lower temperature. CONSTITUTION: The vaporizer comprises a crucible(1) which generally has a hollow cylindrical shape. The inside of the crucible(1) defines a cavity(2) which is arranged to receive a solid off the appropriate species for the gas to be generated. One end(3) of the cavity(2) is open and is connected, in use, to an ion source located within the ion implant system. Around the outer surface of the crucible is a cooling duct(5) helically wound along the entire length of the crucible(1) .A heating element in the form of a thin electrically conductive wire in an insulating housing is helically wound along a groove(8) in the outer surface of the crucible(1). Leading away from the second end(4) of the crucible(1) is a support tube(9) which terminates at a base plate(10) by which the vaporizer is mounted.