| 摘要 |
PURPOSE: Add-drop optical switches comprising parallel fixed and movable reflectors and fabrication methods thereof are provided, which is fabricated along crystallographic planes of a silicon substrate by a wet etching and have good performance. CONSTITUTION: The add-drop optical switch includes a substrate(310), an add light path(340) receiving a radiated light on the substrate, an input light path(320) receiving the radiated light on the substrate and an output light path(330) transmitting the radiated light on the substrate. A drop light path(350) on the substrate transmits the radiated light, and a plurality of fixed reflectors(380,390) connected to the substrate. And a plurality of movable reflectors(360,370) connected to the substrate to move to and from the radiation reflection location. The fixed reflectors and the movable reflectors are arranged on the substrate in order to connect the input light path to the output light path selectively and to connect the input light path to the drop light path selectively and to connect the add light path to the output light path selectively. None of the fixed reflectors are not oriented vertically each other on the substrate, and none of the movable reflectors are not oriented vertically each other on the substrate.
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