| 摘要 |
PROBLEM TO BE SOLVED: To provide a lightweight direct-acting unit, a XY-mobile unit and electronic parts-mounting unit wherein a displacement hardly occurs by a load and a temperature change even if a linear motor is used for a driving source. SOLUTION: The direct-acting unit (50) of the present invention comprises a mobile body (52) having the linear motor (53) for a driving source and a guide section (51) that guides the mobile body. And, a stator of the linear motor can be used also for a constituting member for the guide section. Therefore, as the direct-acting unit is meant to carry a function that the guide section guides the mobile unit as well as to carry a function as a linear motor for a driving source of the mobile body, the unit can reduce itself in weight comparing with a usual one and also can reduce a deflection to the vertical direction. The electronic parts can be correctively mounted to a substrate by constituting the XY-mobile unit and the electronic parts-mounting unit (10) by use of the direct-acting unit. |
