| 摘要 |
PROBLEM TO BE SOLVED: To provide a highly reliable photodiode which can raise its senstivity and can speed up without reducing the sensitivity. SOLUTION: In a photodiode which is formed by a method, where a semiconductor growth layer comprising a light absorbing layer to absorb light to generate carriers is grown on a substrate and a light receiving region is formed in one part of the grown layer, and is provided with a reflection surface or a reflection layer to reflect the light trqnsmitted through the light-receiving region to the grown layer exposed in a substrate removed part formed by removing the part, which is positioned under the light emitting region, of the substrate, a filling material is formed in the substrate removed part.
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