HIGH FREQUENCY DISCHARGE TYPE EXCITATION OXYGEN GENERATOR FOR IODINE LASER AND GENERATING METHOD FOR HIGH FREQUENCY DISCHARGE EXCITATION OXYGEN

摘要

PROBLEM TO BE SOLVED: To generate excitation oxygen effectively by discharge. SOLUTION: This high frequency discharge excitation oxygen generator is provided with a hollow cathode 2 which opens a plasma channel 3, an anode 4 which is placed insulated on the exhaust side of the hollow cathode 2 and a high frequency power source 5 which supplies high frequency electricity between the anode 4 and the hollow cathode 2. Singlet excitation oxygen is generated by the excitation oxygen generator by supplying the gaseous O2 or the gaseous mixture of O2 with other gas to the plasma channel 3 of the hollow cathode 2. An injector 10, which supplies the gaseous NO towards the center of the plasma channel 3, is placed at the supplying side of the plasma channel 3 of the hollow cathode 2 of the excitation oxygen generator. The gaseous NO which is supplied to the central part of the plasma channel 3 is not subject to dissociation but excited to make the gaseous O2 into the excitation oxygen.