发明名称 CHIP-SHAPED ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD, AND PSEUDO WAFER USED FOR MANUFACTURING METHOD OF CHIP-SHAPED ELECTRONIC COMPONENT AND ITS MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a semiconductor chip that utilizes the features of the collective treatment of a wafer, and has a high yield, low costs, and excellent packaging reliability. SOLUTION: This manufacturing method includes a process that puts an adhesive sheet 2 where adhesion is reduced after treatment althrough the adhesion exists before the treatment onto a quartz substrate 1; a process that fixes a plurality of conforming bare chips 3 onto the adhesive sheet 2 while the surface of an Al electrode pad 5 faces down; a process that deposits resin 4 onto an entire surface including the area among the plurality of conforming bare chips 3; a process that performs specific treatment to the adhesive sheet 2 to reduce the adhesive force of the adhesive sheet 2, and peels a pseudo wafer 29 where the conforming bare chips 3 are fixed; and a process that cuts the resin 4 among the plurality of conforming bare chips 3 to separate each conforming chip component 26. In the pseudo wafer 29, the plurality of conforming bare chips 3 where at least the Al electrode pad 5 is provided merely at one surface side are mutually stuck by the resin 4 that continuously covers the area among the conforming bare chips 3 and the back. In the conforming chip component 26, at least the Al electrode pad 5 is provided merely at one surface side, and the entire surface other than one surface is covered with the resin 4.
申请公布号 JP2001308116(A) 申请公布日期 2001.11.02
申请号 JP20000122112 申请日期 2000.04.24
申请人 SONY CORP 发明人 NISHIYAMA KAZUO;OZAKI YUJI;TAKAOKA YUJI;HIRAYAMA TERUMINE
分类号 H01L21/683;H01L21/301;H01L21/48;H01L21/56;H01L21/60;H01L21/68;H01L23/12;H01L23/31;H01L23/485 主分类号 H01L21/683
代理机构 代理人
主权项
地址