| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a pellicle which eliminates the worry about the generation of dust, more particularly the pellicle which can prevent the generation of the adhesive, etc., stuck thus far to the circumference of the pellicle by vibration, impact, contact, etc., as very small foreign matter when transporting or handling the pellicle. SOLUTION: The structure of the dustingless pellicle 1 is obtained by providing the adhesive part of a pellicle film 4 of a pellicle frame 2 of the pellicle formed by spreading the pellicle film 4 via the adhesive 3 to the top edge of the pellicle frame 2 with a gradient toward the inside surface side of the pellicle frame 2.</p> |
