ELECTRONIC CIRCUIT AND ITS FORMING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a new electronic circuit constituted of a conducting part whose conductivity is comparatively high and an insulating part by simplifying a process, saving useless material, and preventing deterioration of pattern precision and contamination of material which are to be caused by increase of working steps. SOLUTION: This electronic circuit has the conducting part which contains solid polyorganosilane and conductive organic polymer as the main component. In this forming method of the electronic circuit, treatment is performed which contains in an arbitrary order (a) a process for exposing a part position of a thin film containing a solid polyorganosilane and conductive organic polymer as the main component by using a coherent light, (b) a process for exposing the same part position under existence of oxygen by using incoherent ultraviolet light, and (c) a process for performing doping with acid or oxidizer.