发明名称 METHOD FOR FABRICATING FIELD EMISSION DISPLAY DEVICE
摘要 PURPOSE: A method for fabricating a field emission display device is provided to simplify a fabrication process and reduce a fabrication cost by forming a structure for lengthening a lifetime of a cathode without performing a gate aperture fabrication process. CONSTITUTION: A cathode electrode(12) is formed on a substrate(11). An insulating layer(13) having an aperture is formed on the cathode electrode(12). The insulating layer(13) is etched by using photoresist(21). The photoresist(21) is removed and an isolation layer(22) is formed on the insulating layer(13). In the process for forming the isolation layer, the substrate(11) is rotated and an incline deposition process is performed by using an electron beam deposition device. A diamond cathode(20) and a diamond layer(23) are formed within the aperture of the insulating layer(13) by using diamond. The isolation layer(22) is removed by performing a liftoff process.
申请公布号 KR100314830(B1) 申请公布日期 2001.11.02
申请号 KR19940018358 申请日期 1994.07.27
申请人 SAMSUNG SDI CO., LTD. 发明人 PARK, NAM SIN
分类号 H01J31/10;G09F9/30;H01J9/02;H01J29/04;H01J31/12;H01L21/205;(IPC1-7):H01J31/10 主分类号 H01J31/10
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