EXPOSURE DEVICE AND EXPOSURE METHOD

摘要

PROBLEM TO BE SOLVED: To expose only the desired regions of a photosensitive substrate without increasing the width of light shielding zones disposed at a mask. SOLUTION: This exposure device has blinds 4a and 4b movable in a direction approximately along the moving direction of the mask so as to shield the optical path of illumination light EL emitted from an illumination optical system between the mask (55) and a projection optical system 5. The blinds 41a and 41b are so moved as to cover the segments (light shielding zones) exclusive of the pattern regions 55 of the mask during the synchronous movement of the mask and the photosensitive substrate (56).