发明名称 APPARATUS AND METHOD FOR ALIGNMENT
摘要 PROBLEM TO BE SOLVED: To carry out a correct alignment of upper and lower cameras of an upper and lower simultaneous observation camera by calculating a quantity of relative deviation between the upper and lower cameras. SOLUTION: (1) A calibration camera is installed on the same supporter as setting a tool. (2) A target mark is installed below the calibration camera. (3) The upper and lower simultaneous observation camera is installed below a movable target mark. (4) A target mark is installed on a table below the upper and lower simultaneous observation camera. (5) The movable target mark and the target mark on the table are recognized by the calibration camera. (6) The movable target mark is recognized by the upper camera of the upper and lower simultaneous observation camera. (7) The target mark on the table is recognized by the lower camera of the upper and lower simultaneous observation camera. (8) A quantity of relative deviation between the upper and lower cameras is calculated to align the upper and lower cameras with each other.
申请公布号 JP2001308148(A) 申请公布日期 2001.11.02
申请号 JP20000125223 申请日期 2000.04.26
申请人 SHIBUYA KOGYO CO LTD 发明人 MINAMI SHIGEKAZU
分类号 H05K13/04;H01L21/52;H01L21/60 主分类号 H05K13/04
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