发明名称 CERAMIC SUPPORTS AND METHODS
摘要 A method of forming a ceramic support (20) for a mask comprises forming a plurality of ceramic ribs (22), a plurality of ceramic strips (24) and a frame (32). Each ceramic rib (22) has a plurality of spaced-apart grooves for receiving the ceramic strips (24). The ceramic ribs (22) are positioned in a spaced apart parallel array, and the ceramic strips (24) are secured in the grooves to form a rectangular grid (30) that is framed by the frame (32).
申请公布号 WO0181998(A1) 申请公布日期 2001.11.01
申请号 WO2001US12825 申请日期 2001.04.19
申请人 COORSTEK, INC. 发明人 CRITTENDEN, JAMES, A.
分类号 G03F1/20;H01J37/317;(IPC1-7):G03F5/00;G21K1/00 主分类号 G03F1/20
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