| 摘要 |
<p>A reticle cassette carrying pod (10) has a top plate (16), base (30), side walls (20-22), and corner posts (26-29) removably attached in sealed engagement to define a cassette receiving chamber (32). A bottom plate (14) attaches to the cassette (74) within a receiving cavity (48) in base (30) to make the cassette receiving chamber (32) substantially airtight. Locking mechanisms (56) in the base have sliding members (58) to engage slots (60) in the bottom plate (14). Retaining members (76) are attached to a pair of sliding members (58) to constrain movement of articles (63) contained in the cassette (74) when the cassette (74) is within the receiving chamber (32) and the locking mechanisms (56) engage the slots (60) in the bottom plate (14).</p> |
