HIGH-FREQUENCY DISCHARGE EXCITED OXYGEN GENERATOR FOR IODINE LASER AND HIGH-FREQUENCY DISCHARGE EXCITED OXYGEN GENERATING METHOD

摘要

A high-frequency discharge excited oxygen generator comprises a hollow cathode where a plasma channel (3) opens, an anode (4) disposed on the exhaust side of the hollow cathode (2) and insulated from the hollow cathode (2), and a high-frequency power supply (5) for supplying high-frequency power to the space between the anode (4) and the hollow cathode (2). O2 gas or a mixture gas of O2 gas and another gas is supplied to the plasma channel (3) so as to generate singlet excited oxygen. The excited oxygen generator further comprises an injector (10) for supplying NO gas toward the center of the plasma channel (3) disposed on the supply side of the plasma channel (3). The NO gas supplied to the central portion of the plasma channel (3) is not dissociated into nitrogen and oxygen and excites O2 gas to excited oxygen.