SEMICONDUCTOR ELECTRET CAPACITOR MICROPHONE

摘要

The noise level of a semiconductor electret capacitor microphone is decreased significantly. A semiconductor electret capacitor microphone comprises a diaphragm (200); a semiconductor chip (100) having spacers (120) for providing predetermined clearances between the diaphragm (200) and a required electronic circuit (130), a fixed electrode (100) and a fixed electrode (110); and a case (400) housing the semiconductor chip (100) and the diaphragm (200). The fixed electrode (110) is connected to ground, and the diaphragm (200) is connected to an input electrode (143) of the semiconductor chip (100). The diaphragm (200) is connected to the input electrode (143) using a conductive spring cover (300) in contact with a diaphragm ring (210) connected electrically with the diaphragm (200), an intermediate terminal 412C formed in the case (400) and being in contact with part of the conductive spring cover (300), and a bonding wire (153) that is means of connection between the intermediate terminal 412C and the input electrode (143).