CHIP MOUNTING DEVICE AND METHOD OF ADJUSTING PARALLELISM IN THE CHIP MOUNTING DEVICE

摘要

A method of adjusting a parallelism in a chip mounting device, comprising the steps of measuring a parallelism between a chip or a head holding the chip and a substrate or a substrate holding stage holding the substrate for a plurality of corresponding positions between the chip or head and the substrate or substrate holding stage, or for each head when the head is changed automatically, calculating the amount of correction of the parallelism for storing the measured parallelism in a target accuracy range, and correcting the parallelism based on the calculated amount of correction of the parallelism, whereby, when a plurality of chips are mounted on the substrate at multiple positions or the chip mounting device having a function to change the head automatically is used, the parallelism can be adjusted automatically for each mounting position or for each head.