METHOD FOR SEALING FINE GROOVE WITH SILICEOUS MATERIAL AND SUBSTRATE HAVING SILICEOUS COATING FORMED THEREON

摘要

A method for sealing a fine groove with a siliceous material, characterized as comprising applying a solution of a perhydropolysilazane having an weight average molecular weight in the range of 3,000 to 20,000 in terms of polystyrene to a substrate having at least one groove having a width of 0.2 ñm or less at its most deep portion and having a ratio of the corresponding depth to the width of 2 or more, to thereby fill and seal the groove with the perhydropolysilazane, and then heating the perhydropolysilazane in an atmosphere containing water vapor to thereby convert the perhydropolysilazane to a siliceous material. The method can be employed for and sealing a fine groove homogeneously with a siliceous material.