发明名称 THERMAL PROCESSING SYSTEM AND THERMAL PROCESSING METHOD
摘要 A thermal processing system performs predetermined thermal processing on an approximately circular to-be-processed object, by applying radiant heat to the to-be-processed object by means of a heating lamp system. The heating lamp system comprises a plurality of lamps disposed concentrically so as to correspond to the to-be-processed object.
申请公布号 WO0182349(A1) 申请公布日期 2001.11.01
申请号 WO2001JP03280 申请日期 2001.04.17
申请人 TOKYO ELECTRON LIMITED;SHIGEOKA, TAKASHI;SAKUMA, TAKESHI;LI, YICHENG 发明人 SHIGEOKA, TAKASHI;SAKUMA, TAKESHI;LI, YICHENG
分类号 C23C16/48;H01L21/00;H01L21/687;(IPC1-7):H01L21/26 主分类号 C23C16/48
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