THERMAL PROCESSING SYSTEM AND THERMAL PROCESSING METHOD
摘要
A thermal processing system performs predetermined thermal processing on an approximately circular to-be-processed object, by applying radiant heat to the to-be-processed object by means of a heating lamp system. The heating lamp system comprises a plurality of lamps disposed concentrically so as to correspond to the to-be-processed object.
申请公布号
WO0182349(A1)
申请公布日期
2001.11.01
申请号
WO2001JP03280
申请日期
2001.04.17
申请人
TOKYO ELECTRON LIMITED;SHIGEOKA, TAKASHI;SAKUMA, TAKESHI;LI, YICHENG