OZONIZER

摘要

PROBLEM TO BE SOLVED: To vaporize liquid ozone except an ozone chamber part. SOLUTION: A slit body 33 is arranged at the central part in an ozone chamber and the ozone chamber 3 is cooled to 70-95 K liquefaction temperature by a cryogenic energy-storing block 8 installed around the outer periphery of the ozone chamber 3. The hole diameter of the slit body 33 is formed in such a hole diameter as not to drop a liquid ozone by the surface tension of liquid ozone. Consequently, the liquid ozone 21 is retained in the hole of the slit body. A reflector 32 for reflecting a laser beam from a heat source 31 is arranged at the lower part of the slit body 33. The liquid ozone 21 exposed from the hole of the slit body 33 is heated and vaporized by using the laser beam reflected from the reflector 32. The vaporized ozone is transported through a process line 12 to a reaction chamber 14. Since the upper part of the ozone chamber 3 being a liquefaction part and the lower part of the ozone chamber 3 being a vaporization part can be independently controlled in the structure, a continuous operation is made possible.