| 摘要 |
PROBLEM TO BE SOLVED: To simply detect an abnormality of a sensor element using the vibration of a vibrator. SOLUTION: Electrode parts 51-1 to 51-4 cooperate with electrode parts 52-1 to 52-4 to vibrate the vibrator 20 with a specified amplitude in an X-axis direction. Electrode parts 53-1 to 53-4 detect an angular velocity acting around a Z-axis by detecting the vibration of the vibrator 20 in a Y-axis direction. The electrode parts 52-1 to 52-4 and 53-1 to 53-4 are impressed with high-frequency signals different in frequency. Signals from the electrode parts 52-1 to 52-4 and 53-1 to 53-4 are demodulated by an output circuit 70, thereby detecting the vibration of the vibrator 20 in the X-axis and Y-axis directions. An abnormality of the sensor element is determined based on the level of the demodulated signal expressing the vibration in the X-axis direction. Dummy electrode parts 54-1, 54-2 of fixed capacity electrically parallel-connected to the electrode parts 51-1 to 51-4 are provided on a board 10, thereby increasing apparent capacitance of the electrode parts 51-1 to 51-4 used to detect abnormality of the sensor element. |
